ECTC 2023 Best Papers Available as OA on Xplore
ECTC 2023 Best Papers will be available on Xplore as Open Access until June 1, 2024.
1) Best Session Paper
Fine Pitch Die-to-Wafer Hybrid Bonding
Thomas Workman, Jeremy Theil, Gill Fountain, Dominik Suwito, Cyprian Uzoh, Guilian Gao, K. M. Bang, Bongsub Lee, Laura Mirkarimi – Adeia
2) Outstanding Session Paper
A New Adhesive for CoW Cu-Cu Hybrid Bonding with High Throughput and Room Temperature Pre-Bonding
Yasuhisa Kayaba, Yuzo Nakamura, Wataru Okada, Takuo Shikama, Kahori Tamura, Satoshi Inada – Mitsui Chemicals, Inc.
3) Best Interactive Presentation Paper
50 nm Overlay Accuracy for Wafer-to-Wafer Bonding by High-Precision Alignment Technologies
Hajime Mitsuishi, Hiroshi Mori, Hidehiro Maeda, Mikio Ushijima, Atsushi Kamashita, Masashi Okada, Masanori Aramata, Takashi Shiomi, Shinya Sakamoto, Kishou Takahata, Tomohiro Chiba, Minoru Fukuda, Masahiro Kanbayashi, Toshimasa Shimoda, Isao Sugaya – Nikon Corporation
4) Outstanding Interactive Presentation Paper
Optimization of the Cu Microstructure to Improve Copper-to-Copper Direct Bonding for 3D Integration
Ralf Schmidt, Christian Schwarz – Atotech (MKS Instruments)
5) Intel Best Student Paper
Michael Molter, University of Illinois Urbana-Champaign, Rahul Kumar, Sonja Koller, Osama Waqar Bhatti, Nikita Ambasana, Elyse Rosenbaum and Madhavan Swaminathan
6) Intel Outstanding Student Paper Award
Scalable Fiber-Array-to-Chip Interconnections with Sub-Micron Alignment Accuracy
Shengtao Yu, Georgia Institute of Technology, Thomas K. Gaylord, Muhannad S. Bakir
7) TI Best IP Student Award
Xinyue Wang, Fudan University, Zhoudong Yang, Fudan University, Guoqi Zhang, TU Delft, Jing Zhang, Heraeus Materials Technology, Pan Liu, Fudan University